The invention aims at providing a preparation method of nanometer
silicon quantum dots and application of the method in the manufacture of film solar batteries. The invention uses a PECVD method for growing
amorphous silicon, and adopts double light beams for scanning the crystalline
amorphous silicon films layer by layer, i.e. the double-light-beam interference of two beams of
femtosecond lasers with the polarization state of round polarization state is used for forming nanometer
crystalline silicon in amorphous lattices, and the scanning on the
amorphous silicon by the double beams of the
femtosecond lasers layer by layer utilizes the movement of a three-dimensional sample table. First, the
femtosecond laser is gathered at a point in the sample, and the
laser carries out plane scanning on the samples in the depth of the sample in a way of moving scanning line by line. After the scanning of the layer is completed, the sample table is moved up, and the
laser is gathered on an upper plane again for scanning. Through regulating and controlling the laser power, the pulse width, the repeating frequency and the scanning speed, nanometer
silicon arrays with the size distribution of the
crystal grains in a range from 30 to 50 nm and the
crystal grain space controlled between 20 and 40 nm are formed in the amorphous
silicon lattices, the nanometer silicon
quantum dot layer can be used for manufacturing silicon base film batteries, and the battery conversation efficiency can be improved.