This invention discloses an
environmentally friendly and efficient 4H-SiC
polishing slurry and its preparation method, belonging to the technical field of
polishing compositions. The 4H-SiC
polishing slurry of this invention comprises the following components: 1.5 wt.%~6 wt.%
abrasive, 0.2 wt.%~0.4 wt.% photocatalyst, 2 wt.%~4 wt.% H2O2, an
organic base pH adjuster to adjust the pH value of the 4H-SiC polishing
slurry to 8~11, and the balance being water; wherein the
organic base pH adjuster includes at least one of
tetramethylammonium hydroxide,
tetraethylammonium hydroxide, and
choline hydroxide. The composition design of this invention is simple and easy to prepare. It has a high
material removal rate for 4H-SiC, significantly reduces
surface roughness after polishing, and is
environmentally friendly and
pollution-free, possessing the advantages of being
environmentally friendly and efficient, and has broad application prospects in high-precision polishing of 4H-SiC.