The invention discloses a TiZrMnFe
quaternary getter alloy material and a preparation method and application thereof. The
chemical formula of the TiZrMnFe
quaternary getter alloy material is TixZr1-xMnFe (x is equal to 0-0.4), and the TiZrMnFe
quaternary getter alloy material is specifically composed of, by
mass, 2.3 wt%-10.4 wt% of
titanium, 29.6 wt% to 41.6 wt% of
zirconium; 27.8 wt% to 29.8 wt%of
manganese; and 28.0 wt% to 30.3 wt% of iron. The
crystal form of the TiZrMnFe quaternary getter alloy material is a C14 type laves
crystal structure, and the grain size of the TiZrMnFe quaternarygetter alloy material is 20 microns to 50 microns. The preparation method comprises the steps that Ti, Zr, Mn and Fe pure
metal with a certain stoichiometric ratio is weighed, proportioned and smeltedto obtain an alloy
ingot, heat treatment is conducted, and the alloy
ingot obtained after heat treatment is subjected to crushing, ball milling and sieving to be prepared into TiZrMnFe air suction alloy
powder with different particle sizes. The alloy
powder is pressed into getter products in various shapes through a cold press, or alloy
powder adsorption
slurry is brushed on the surface of a device through an
adhesive. The preparation process is simple and feasible, the
nitrogen adsorption capacity of the getter per
unit mass is high and is superior to that of a ternary ZrMnFe alloy, and thepreparation cost is low.