This application relates to the field of
field emission scanning electron microscopy (FET) technology, and in particular to an
electron microscope gun valve. The
electron microscope gun valve includes a
valve seat and a second control valve disposed on the
valve seat. The
valve seat is sealed between the gun lens and the objective lens; the valve seat has a gas passage, including a first channel connecting to a molecular pump, a second channel connecting to an
ion pump, and a third channel connecting to the gun lens, all three being interconnected. The second control valve can close the first channel to
cut off its connection with the other two channels. Therefore, with the
electron microscope gun valve of this application, which includes a gas passage and a second control valve, the molecular pump can be used to evacuate the microscope
barrel and the
ion pump first, allowing the
ion pump to quickly reach the starting conditions before starting, thus avoiding forced start-up of the
ion pump before the starting conditions are met, which would affect its service life, and effectively improving the efficiency of vacuum establishment in the microscope
barrel.