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45results about How to "Reduce void defects" patented technology

Manufacturing method of image sensor using deep trench isolation

The invention provides a manufacturing method of image sensor using deep trench isolation. The manufacturing method includes: providing a substrate which comprises a substrate monocrystalline layer; etching the substrate monocrystalline layer to form a plurality of monocrystalline walls raised, the top and lateral surfaces of each which are covered with a dielectric layer; subjecting the surface of the substrate monocrystalline layer between the monocrystalline walls to selective epitaxy so as to form a first epitaxial monocrystalline layer, removing the part, covering the top surfaces of the monocrystalline walls, of the dielectric layer so as to expose the top surfaces of the monocrystalline walls, and subjecting the top surfaces of the monocrystalline walls and the surface of the first epitaxial monocrystalline layer to selective epitaxy so as to form a second epitaxial monocrystalline layer; forming part of components of the image sensor in the first and second epitaxial monocrystalline layers. The manufacturing method has the advantages that the defects of the isolation structure of the epitaxial monocrystalline layers are effectively decreased, functional damage to the components of the image sensor is avoided, and quality of the components of the image sensor is improved.
Owner:GALAXYCORE SHANGHAI

Formation method of metal interconnection structure

The invention provides a formation method of a metal interconnection structure. The method comprises that a metal seed crystal layer is formed at the surface of a semiconductor substrate and in grooves of the semiconductor substrate, and then a shield layer is formed at the surface of the metal seed crystal layer; and the shield layer at the bottom of the grooves is removed to expose the metal seed crystal layer at the bottom of the grooves, and the shield layer which covers the sidewalls of the grooves is reserved. In the subsequent process that a metal layer is formed on the metal seed crystal layer, the metal layer cannot be formed at the sidewalls of the grooves due to that the sidewalls of the grooves are covered with the shield layer, and the metal layer can be only formed from bottom to top gradually on the metal seed crystal layer, which is exposed at the bottom of the grooves, till the grooves are filled; the defect that gaps are formed in the metal layer in the grooves due to the fact that openings of the grooves are closed too early when the grooves are not full of metal layer; and further, the performance of the metal interconnection structure formed in the grooves subsequently and the performance of a semiconductor device formed subsequently are improved.
Owner:SEMICON MFG INT (SHANGHAI) CORP

Stirring head for welding metal and thermoplastic polymer and welding method

The invention provides a stirring head for welding metal and a thermoplastic polymer and a welding method, and belongs to the field of new material connection. The stirring head is characterized by a concave shaft shoulder and an inverted-tower-shaped stirring needle with a multi-stage flow blocking circular truncated cone structure of the stirring head. The welding method is characterized in that friction stir lap welding is completed by heating the two sides of the upper surface of a welding seam through a resistance type auxiliary heating strip, and an auxiliary heat source can provide the effects of preheating before welding and slow cooling after welding for a welded plate. According to the stirring head for welding the metal and the thermoplastic polymer and the welding method, the flow choking appearance design of the stirring head can inhibit the overflow of a thermoplastic polymer material and improve the surface quality of the welding seam; and the welding auxiliary heating process for the metal and the thermoplastic polymer material is based on the thoughts of isothermal peak rotation speed reduction and stress reduction anti-pulling-off, the rotation speed of the stirring head is reduced under the condition that the same welding temperature is guaranteed, and therefore joint surface forming is improved, internal defects are eliminated, the interface structure is optimized, and the quality of a heterogeneous joint is comprehensively improved.
Owner:SHENYANG AEROSPACE UNIVERSITY

Local vacuum casting method for aluminum alloy

ActiveCN111004948AThe toggle range is stableSmall grain diameterVacuum castingSlag
The invention provides a local vacuum casting method for aluminum alloy. A raw material is sequentially added step by step, and ultrasonic vibration treatment and mechanical stirring treatment are combined, so refinement of a melt structure can be remarkably promoted, the dendritic crystal spacing is reduced, and the dendritic crystal spacing is stable; an alloy casting is formed under the actionof vacuum and pressure formed at the upper part of a crystallizer through the local vacuumizing casting method, the grain diameter is small, the structure is compact, and the hole defects are few; theconnection among a filter chamber box, a molten aluminum inlet and a crystallizer is always kept in a vacuum state, so the situations of segregation, turbulence, easy gas entrapment and oxidation ofthe aluminum alloy in the production process are reduced, the shifting amplitude of the liquid level of the aluminum alloy is stable, and the slag entrapment phenomenon can be obviously improved; andthe local vacuumizing casting method for aluminum alloy has the advantages of simple device, and easiness in operation, and the prepared aluminum alloy has no obvious defects such as cracks, pits andslag inclusion on the surface, and has the advantages of large tensile strength, good yield strength and high extrudability.
Owner:佛山市三水凤铝铝业有限公司 +1

Silicon carbide wafer, silicon carbide ingot and preparation method thereof

The invention relates to a silicon carbide wafer, a silicon carbide ingot and a preparation method thereof, and belongs to the field of semiconductor materials. The silicon carbide single crystal wafer contains nitrogen, the number of hexagonal color spots of the silicon carbide single crystal wafer is not more than 50, the edge parts forming the hexagonal color spots are perpendicular to the <10-10> direction, and the number of holes contained in the edge parts of each hexagonal color spot is not more than 10. According to the invention, novel defects, i.e. hexagonal color spots and cavity defects on the hexagonal color spots, existing in the nitrogen-containing silicon carbide wafer are discovered, the hexagonal color spots enable the resistivity of the silicon carbide wafer to be non-uniform and seriously influence the electrical properties of a semiconductor device prepared from the silicon carbide wafer, for example, the device made on the silicon carbide wafer is invalid, and theexistence of the cavities not only influences the performance of the silicon carbide wafer, such as breakdown field intensity, but also may extend to a device manufactured by taking the silicon carbide single crystal wafer as a substrate. The present application provides a silicon carbide wafer and a silicon carbide ingot including hexagonal spots and a small number of cavities.
Owner:SICC CO LTD

Low-price gang saw tool bit product and preparation method thereof

The invention discloses a low-price gang saw tool bit product and a preparation method thereof, and particularly relates to the field of gang saw tool bits. A tool bit material adopted by the tool bitproduct is formed by mixing and sintering metal powder, liquid paraffin and diamond, wherein the metal powder is prepared from the following powder raw materials in part by weight: 35-45 parts of cobalt, 25-35 parts of iron, 25-35 parts of copper, 1-5 parts of nickel and 0.8 part of La, the liquid paraffin accounts for 1-1.2 parts, and the diamond accounts for 30% of the volume of the tool bit material. According to the low-price gang saw tool bit product and the preparation method thereof, by adding different contents of Fe, Cu, Ni and Sn and a small amount of rare earth elements, the hardness HRB, the bending strength and the abrasion ratio of a matrix are kept, so that the mechanical property and the abrasion resistance of the gang saw tool bit to the matrix are met; and the characteristics of the matrix are matched by using the diamond with the fixed grade and granularity, the holding force of the matrix on the diamond and the edge exposure effect are ensured, and the cutting sharpness and the service life of a cobalt-based product are achieved by using a sintering process matched with the characteristics of the matrix.
Owner:QINGDAO SHINHAN DIAMOND INDUSTRY CO LTD

Preparation process of mesophase pitch based protofilament continuous filament

The invention discloses a preparation process of a mesophase pitch based a protofilament continuous filament. The preparation process comprises the following steps of sending mesophase pitch into a screw extruder through a feeder; heating, by a screw of the extruder, the mesophase pitch, and carrying out reduced pressure deaeration when the screw runs; conveying, by the screw extruder, a melted and deaerated melt into a spinning component through a metering pump, spreading the melt into a spinneret through a spure spreader of the spinning component, and extruding through spinneret orifices ofthe spinneret to carry out spinning; oiling an extrusion-molded fiber bundle, drawing by a drawing roll, and then collecting the filament. A reduced pressure deaeration opening in the preparation process is located behind a final zone; on one hand, the melt in a melting zone can be prevented from being evacuated and broken down to cause that a suction gas is dissolved in the melt. The mesophase pitch is completely molten after passing through a screw melting zone, and is uniformly mixed under the shearing action of a twin screw to be capable of forming a layer of thin and uniform melt in a tank; at the moment, gas bubbles in the interior of the melt can be completely separated through the reduced pressure deaeration. The preparation process is good in production efficiency, and moreover, the prepared mesophase pitch based protofilament is good in performance.
Owner:西安天运新材料科技有限公司

Method for improving gap filling capability of pre-metal dielectric

ActiveCN103681459AChange in growth rateHigh vertical growth rateSolid-state devicesSemiconductor/solid-state device manufacturingDielectricEngineering
The invention discloses a method for improving gap filling capability of a pre-metal dielectric. The method comprises the following steps: taking a shallow groove isolation area in a semiconductor substrate as a boundary, and forming a CMOS structure adopting a PMOS structure and an NMOS structure, wherein both the PMOS structure and the NMOS structure at least comprise gate oxides and polycrystalline silicon grid electrodes formed on the surface of the semiconductor substrate in sequence, side wall layers positioned on the two sides of the polycrystalline silicon grid electrodes and active areas positioned on the two sides of the polycrystalline silicon grid electrodes and in the semiconductor substrate; depositing a stress silicon nitride layer on the surface of the CMOS structure; depositing a silicon oxide layer on the surface of the stress silicon nitride layer, performing anisotropic etching, and reserving a silicon oxide layer on the side walls of the stress silicon nitride layer; performing fluorine treatment on the surfaces of the silicon oxide layer and the stress silicon nitride layer, and improving the growth selection ratio of the pre-metal dielectric on the surface of the stress silicon nitride layer and the surface of the silicon oxide layer; depositing the pre-metal dielectric. Through the adoption of the method, the defect that void is formed between the grid electrodes can be effectively overcome.
Owner:SEMICON MFG INT (SHANGHAI) CORP

Silicon carbide single crystal ingot, substrate and preparation method thereof

The invention relates to a silicon carbide single crystal ingot, a substrate and a preparation method thereof, and belongs to the field of semiconductor materials. The silicon carbide substrate contains a nitrogen element, the silicon carbide substrate has no more than 50 hexagonal color spots, and the edges forming the hexagonal color spots are perpendicular to the <10-10> direction. The edges of the hexagonal color spots comprise inner side edges and outer side edges, the inner side edges defines a hexagonal area, cavities are formed between the inner side edges and the outer side edges, and the centers of not smaller than 80% of the cavities are located on one side of the central axis between the inner side edges and the outer side edges. The invention provides the nitrogen-containing silicon carbide substrate with novel defects, namely few hexagonal color spots and cavity defects, the resistivity of the silicon carbide substrate is uniform, and a semiconductor device prepared from the silicon carbide substrate is excellent in electrical performance; and the performance of the silicon carbide substrate such as breakdown field intensity is excellent, and the number of cavities generated by extension of the manufactured device is extremely small.
Owner:SICC CO LTD

Preparation method of resinified graphene anticorrosive paint based on high-temperature mechanochemistry

The invention discloses a preparation method of resinified graphene anticorrosive paint based on high-temperature mechanochemistry. The preparation method comprises the following steps: taking graphene or graphene oxide, and adding phenylenediamine into a graphene or graphene oxide aqueous solution for modification pretreatment; adding an organic resin and a solvent, adopting high-temperature mechanochemical method for treatment, and subjecting an obtained solution to centrifugation, suction filtration and drying to obtain a resinified graphene; mixing the resinified graphene with an organic resin, a diluent and an additive, and mechanically stirring to obtain a component A; and uniformly mixing the component A with a component B curing agent to obtain the resinified graphene anticorrosivepaint. According to the invention, the chemical reaction of graphene and the organic resin can be realized through a high-temperature mechanochemical technology; the resinified graphene can be uniformly dispersed in the organic resin, the bonding strength with a film-forming substance is higher, hole defects in a coating are reduced, and the barrier property and mechanical properties of the coating are improved, so that better corrosion resistance is achieved.
Owner:NORTHEASTERN UNIV

Silicon carbide wafer, crystal ingot and preparation method thereof

The application relates to a silicon carbide wafer, a crystal ingot and a preparation method thereof, belonging to the field of semiconductor materials. The silicon carbide single wafer contains nitrogen, and the silicon carbide single wafer has no more than 50 hexagonal color spots, and the sides forming the hexagonal color spots are perpendicular to the <10-10> direction, and each hexagonal color spot The number of cavities contained in the edges is not more than 10. The present application finds that a novel defect existing in a nitrogen-containing silicon carbide wafer is a hexagonal color spot and a void defect existing on the hexagonal color spot, and the hexagonal color spot will make the resistivity of the silicon carbide wafer non-uniform, Seriously affect the electrical properties of semiconductor devices made of silicon carbide wafers, such as making devices made on silicon carbide wafers fail; the existence of voids not only affects the performance of silicon carbide wafers such as breakdown field strength, but the voids may extend to carbonization. A device made from a single wafer of silicon as a substrate. The present application provides a silicon carbide wafer and a silicon carbide ingot containing hexagonal color spots and a small number of voids.
Owner:SICC CO LTD

Method for Improving Gap Filling Ability of Pre-Metal Dielectric Layer

ActiveCN103681459BChange in growth rateHigh vertical growth rateSolid-state devicesSemiconductor/solid-state device manufacturingSilicon oxideEngineering
The invention discloses a method for improving gap filling capability of a pre-metal dielectric. The method comprises the following steps: taking a shallow groove isolation area in a semiconductor substrate as a boundary, and forming a CMOS structure adopting a PMOS structure and an NMOS structure, wherein both the PMOS structure and the NMOS structure at least comprise gate oxides and polycrystalline silicon grid electrodes formed on the surface of the semiconductor substrate in sequence, side wall layers positioned on the two sides of the polycrystalline silicon grid electrodes and active areas positioned on the two sides of the polycrystalline silicon grid electrodes and in the semiconductor substrate; depositing a stress silicon nitride layer on the surface of the CMOS structure; depositing a silicon oxide layer on the surface of the stress silicon nitride layer, performing anisotropic etching, and reserving a silicon oxide layer on the side walls of the stress silicon nitride layer; performing fluorine treatment on the surfaces of the silicon oxide layer and the stress silicon nitride layer, and improving the growth selection ratio of the pre-metal dielectric on the surface of the stress silicon nitride layer and the surface of the silicon oxide layer; depositing the pre-metal dielectric. Through the adoption of the method, the defect that void is formed between the grid electrodes can be effectively overcome.
Owner:SEMICON MFG INT (SHANGHAI) CORP

Coating device for mixed solution of precursor and surfactant and use method of coating device

The invention relates to a coating device for a mixed solution of a precursor and a surfactant. The device comprises a coating die head, a die head lifting table, a post-processing device, a coating platform and a conveying device, a to-be-coated substrate is coated by the coating die head and then is conveyed to the post-processing device by the conveying device for post-processing, and under thedriving of the conveying device, the relative movement is generated between the die head lifting table and the coating platform. The coating die head is communicated with an injection pump with a mixing cavity through a guide pipe, the injection pump is communicated with at least two raw material bottles, one raw material bottle is filled with a divalent precursor solution, and the other raw material bottle is filled with a surfactant solution. The injection pump respectively and simultaneously sucks the divalent precursor solution and the surfactant solution and injects the divalent precursor solution and the surfactant solution into the mixing cavity for mixing, and the mixed solution is conveyed to the coating die head for use. The invention further discloses a using method and application of the coating device. According to the present invention, the coverage rate of the coating film and the flatness of the surface of the coating film are improved, and the perovskite thin film with more uniform film thickness distribution is obtained.
Owner:HANGZHOU MICROQUANTA SEMICON CO LTD

A kind of method for preparing optical anti-counterfeiting element

The invention provides a method capable of accurately positioning a coating for producing an anti-counterfeiting optical element and aims at overcoming the defects that the efficiency is low, and fine mapping, metal removal and hollowing cannot be realized in the prior art for producing the anti-counterfeiting element. The method comprises the following steps: forming an undulating structural layer comprising at least a first undulating structural layer area and a second undulating structural layer area on the surface of a substrate, wherein the ratio of the surface area to the apparent area of the first undulating structural layer area is greater than the ratio of the surface area to the apparent area of the second undulating structural layer; forming a first coating on at least one part of the first undulating structural layer area and forming a second coating on at least one part of the second undulating structural layer area; forming protecting layers which can be heated for sublimating on the at least one part of the first coating and on the at least one part of the second coating, wherein the thickness of the protecting layer on the first coating is smaller than that of the protecting layer on the second coating; heating to sublimating the protecting layers until the protecting layer on the first coating is completely sublimated and the protecting layer on the second coating is not completely sublimated; hollowing out the coating part which is not protected by the protecting layers.
Owner:ZHONGCHAO SPECIAL SECURITY TECH +1
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