The invention discloses a preparation method of a diazonium
photosensitizer, which comprises the following steps: 1) mixing concentrated
sulfuric acid and
phosphoric acid according to a proper ratio to obtain a mixed acid, cooling, and slowly adding a proper amount of p-aminodiphenylamine diazonium
sulfate (VRT) which is a wet product; wherein the temperature is controlled to be 20-40 DEG C when the p-aminodiphenylamine diazonium
sulfate is added; 2) slowly adding a proper amount of
paraformaldehyde after the
dissolution in the step 1) is finished, and reacting at the temperature of below 40 DEG C until the reaction is complete; 3) dissolving a reaction solution completely reacted in the step 2) in water, adding a proper amount of a
chlorine salt, and separating out a yellow precipitate; and 4) filtering, and
drying the yellow precipitate to obtain the product. According to the preparation method disclosed by the invention, reaction with
paraformaldehyde is carried out in the mixed acid, the
reaction temperature can be effectively increased, the direct damage effect of the concentrated
sulfuric acid on the raw materials is reduced, the reaction can be carried out at a relatively high temperature which is easier to control, the weight of the synthesized
photosensitizer required for
photoresist mixing is reduced to 90%, and the cost is saved.