This invention discloses a large-size
molybdenum-
titanium alloy target and its preparation method. The preparation method includes the following steps: S1, selecting raw materials
molybdenum powder and
titanium powder; S2, granulating the
molybdenum powder under
inert gas protection to prepare granulated molybdenum powder, wherein the particle size and tap density of the granulated molybdenum powder are matched with those of the
titanium powder; S3, mixing the granulated molybdenum powder and
titanium powder in a certain proportion under
inert gas protection; S4, degassing the mixed powder; S5,
hot isostatic pressing to form an
ingot; S6, vacuum heat treatment of the
ingot to obtain the large-size molybdenum-
titanium alloy target. By adding the
granulation and forming process of molybdenum powder, the morphology of the raw materials is controlled, effectively suppressing the tendency of the mixed powder to separate in subsequent
processing. This method significantly improves the compositional uniformity and batch stability of the molybdenum-
titanium alloy target, avoids product defects and
scrap due to separation, thereby reducing production costs and improving product qualification rate.