The invention discloses a
silicon-dioxide optical
waveguide production process for manufacturing an optical divider. The
silicon-dioxide optical
waveguide production process includes a lower
waveguide wrapping layer manufacturing step, a waveguide core layer manufacturing step, a lower waveguide wrapping layer and waveguide core layer annealing and hardening step, a photoetching step, a non-waveguide area treatment step, an upper waveguide wrapping layer manufacturing step and an upper waveguide wrapping layer annealing and hardening
processing step. The lower waveguide wrapping layer manufacturing step includes growing a SiO2 layer on a
silicon wafer by the
flame hydrolysis method or the
chemical vapor deposition process, and
doping phosphorous and
boron ions as a lower waveguide wrapping layer. The waveguide core layer manufacturing step includes growing another SiO2 layer on the lower wrapping layer as a waveguide core layer by the
flame hydrolysis method or the
chemical vapor deposition process. The lower waveguide wrapping layer and waveguide core layer annealing and hardening step includes adopting annealing and hardening to let the two SiO2
layers be compact and uniform; the photoetching step includes protecting required waveguide graphs with
photoresist. The non-waveguide area
processing step includes
etching a non-waveguide area by the
reactive ion etching process. The upper waveguide wrapping layer manufacturing step includes removing the
photoresist, covering another SiO2 layer on the waveguide core layer again by the
flame hydrolysis method or the
chemical vapor deposition process and
doping the
boron and phosphorous ions as an upper waveguide wrapping layer. The upper waveguide wrapping layer annealing and hardening step is used for fining and compacting the SiO2 layer of the upper waveguide wrapping layer. According to the above theory, the optical divider manufactured by the
silicon dioxide optical waveguide is low internal
residual stress, insignificant in birefrigent effect and is good in mechanical performance and
thermal stability.