The invention discloses an environment-friendly
silicon material
surface cleaning reagent and a preparation method thereof, the environment-friendly
silicon material
surface cleaning reagent comprises
hydrofluoric acid,
citric acid, EDTA tetrasodium, 1-hydroxyethylidene-1, 1-diphosphonic acid and pure water, and the environment-friendly
silicon material
surface cleaning reagent is characterized in that the
citric acid accounts for 20-25%, the
hydrofluoric acid accounts for 4-5%, the EDTA tetrasodium accounts for 0.5-1%, the 1-hydroxyethylidene-1, 1-diphosphonic acid accounts for 0.5-1%, and the pure water accounts for 0.5-1%. The proportion of the
hydroxyethylidene diphosphonic acid is 0.5%-1%, the proportion of the pure water is 70%-73%, the
chemical formula of the
hydrofluoric acid is HF, the
chemical formula of the
citric acid is C6H8O7, the
chemical formula of the EDTA tetrasodium is C10H12N2Na4O8, the chemical formula of the
hydroxyethylidene diphosphonic acid is C2H8O7P2, and the chemical formula of the pure water is H2O. According to the environment-friendly silicon material surface cleaning reagent and the preparation method thereof, citric acid is used as a main material, HF and the chelating agent are matched,
metal pollutants and surface oxides in a silicon material are removed, meanwhile, the reagent does not contain substances which chemically react with the silicon material,
raw material loss is effectively avoided, and the
raw material utilization rate is increased.