The invention discloses a micromachining method for manufacturing a
polymer cylindrical
microlens by
electric field induction. The method comprises the following steps of:
machining on a SiO2 substrate to form a transparent conductive grid structure,
spinning an SU-8
photoresist, photoetching and developing a circle of bracket to form a cylindrical
electric field contour surface, and evaporating a conductive
indium tin oxide (ITO) layer at the bottom of the SiO2 substrate;
spinning ultraviolet curing
polymer, and pressing a transparent template on the
ultraviolet curing
polymer to make the bracket made of the SU-8
photoresist pressed into a polymer film; making the conductive grid structure of the plane generate the cylindrical
electric field contour surface on the surface of the polymer film by using a
direct current power supply, and forming a cylindrical
microlens structure; keeping polymer
rheology under an electric field with a stabilized
voltage value to form the cylindrical
microlens structure; and finally, exposing the curing polymer through
ultraviolet light, and removing the template to obtain a needed polymer cylindrical microlens array. The method has the advantages of high production efficiency, simple process and low cost.