The invention belongs to the technical field of electronic-grade
hydrofluoric acid industry, and discloses a preparation method of electronic-grade
hydrofluoric acid, which comprises the following steps: conveying industrial-grade
anhydrous hydrogen fluoride liquid to the middle part of a rectifying
tower, and conveying a high-purity oxidant to the bottom of the rectifying
tower; total
reflux is used at the top of the rectifying
tower, and the uncondensed high-purity
oxidizing agent and the
oxidizing agent entering from the bottom of the rectifying tower converge and then are recycled;
hydrogen fluoride liquid obtained at the bottom of the rectifying tower is conveyed to the upper part of the de-heavy tower; feeding all
hydrogen fluoride gas at the top of the de-heavy tower to the lower part of a water
scrubber, and feeding
ultrapure water from the middle part of the water
scrubber; and enabling the condensed
hydrogen fluoride liquid part to flow back to the
water washing tower, filtering the extracted
hydrogen fluoride liquid, and blending with
ultrapure water to obtain the final electronic-grade
hydrofluoric acid product. According to the method, the equipment
investment cost of the reactor is saved, and the circulating oxidant is used for oxidation, so that the usage amount of the oxidant is reduced, the oxidation effect of the oxidant is ensured, and the safety of the production process and the final product quality are improved.