The invention relates to a
wafer recovery method, a diffractive optical
waveguide manufacturing method, and a diffractive optical
waveguide. The
wafer recycling method comprises the following steps that a
diffraction optical
waveguide to be recycled is provided, the
diffraction optical waveguide to be recycled comprises a substrate
wafer, a
cut-off layer and a
grating wafer which are arranged in a stacked mode, and the surface of the
cut-off layer and / or the surface of the
grating wafer have defects caused by
etching; carrying out
etching and / or chemical mechanical
polishing on the defect surface of the
diffraction optical waveguide to be recycled until the preset
surface roughness is reached, so as to obtain a recycled wafer; the manufacturing method of the diffraction optical waveguide comprises the following steps of forming a thin film wafer on the surface of a
cut-off layer of a receiving sheet, and carrying out
etching treatment on the surface of the thin film wafer, and S3, before manufacturing is completed, if the cut-off layer and / or the surface of a
grating wafer have defects caused by etching, preparing a recycled wafer according to the recycling method. According to the method, recycling of unqualified products is achieved, the production cost is reduced, the stability of the performance of the
recycled products is improved, and the method is suitable for medium-batch and large-batch
machining and manufacturing of the
silicon carbide diffraction optical waveguides.