The invention relates to a method used for preparing compounds or high-purity compounds having a general formula of R(4-m-n)AClmHn, and an apparatus suitable for implementing the method, and especially relates to an apparatus for preparing silane having a general formula of HnSiCl4-n through disproportionating highly-chlorinated silane in the presence of a catalyst, and a method thereof, wherein A is Si, Ge, Ti or Sn; n is 1, 2, 3 or 4; and the apparatus used for the method is an assembly composed of at least one distillation tower and at least one bypass reactor which is an external reactor. The invention also relates to a catalyst comprising alkylaminotrialkoxy silane having a general formula of (CxH2x+1O)3Si(CH2)zN(CyH2y+1)2, and a method for preparing trichlorosilane (HSiCl3) through catalytic hydrogenation dehalogenation of tetrachlorosilicane (SiCl4) in the presence of hydrogen. The invention further relates to a method for preparing alkylhydrochlorosilane having a general formula of Ia(R(4-m-n)SiClmHn), wherein m is 1 or 2, n is 1 or 2, the m+n value is not equal to 3, and R represents a C1-5 alkyl group. The invention discloses a method for processing silicon tetrachloride, germanium tetrachloride, titanium tetrachloride or tin tetrachloride containing at least one hydrogen-containing compound which cannot be separated through distillation, and an apparatus thereof. The invention also discloses a continuous method for preparing high-purity silicon tetrachloride, germanium tetrachloride, titanium tetrachloride or tin tetrachloride, and an apparatus and a reactor thereof.