According to the high-isolation
antenna array based on the MEMS technology and the preparation method, the characteristic of high
processing precision of the
silicon-based MEMS technology is utilized, the size of the
antenna array is accurately controlled, the performance consistency in the W
wave band is ensured, the loss caused by
processing errors is effectively reduced, the
radiation efficiency and the
gain stability of the antenna are improved, and the
antenna array is suitable for large-scale popularization and application. The formed antenna array is miniaturized and high in integration level,
batch production is facilitated, production cost is reduced, a shielding cavity formed by the third TSV columns and an isolation structure formed by the first TSV columns and the second TSV columns are designed, space
coupling of signals in the transmission process from a
radio frequency signal line to a feed probe is effectively restrained, and the antenna array is more compact in structure and more compact in structure. The antenna array isolation degree is improved, the performance of the antenna is remarkably improved, the performance deterioration caused by array pattern
distortion and cross
coupling change during large-angle
beam scanning is effectively reduced by optimizing the antenna array
layout and the low cross
coupling design, a wider scanning angle range is supported, and the space coverage capacity of the antenna array is improved.