A megasonic auxiliary
polishing device for a large-
diameter gallium antimonide wafer relates to the technical field of
wafer surface
polishing and comprises a
wafer carrier head, a
polishing disc and a megasonic generator. The polishing solution containing device is arranged above the megasonic generator, a high-
frequency oscillation signal sent by the megasonic generator is converted into high-frequency mechanical oscillation to be transmitted into the polishing solution, an agglomerated
colloidal solution formed by an
abrasive part in the polishing solution is scattered, aggregation of nanoscale micelles is inhibited, and then the uniform distribution of the polishing solution
colloidal solution on the polishing disc is promoted. The consistency of the roughness of the surface of the wafer in the polishing process is high; the polishing disc is in a circular ring shape, the wafer carrying heads are evenly distributed on the circumference of the polishing disc, the portion, between the adjacent wafer carrying heads, of the polishing disc is provided with a washing cover, washing pipes are evenly arranged in the washing cover, and liquid discharged from the lower ends of the washing pipes washes the polishing disc to wash away scraps on the surface of the polishing disc. And an adverse
influence factor on the polishing quality of the wafer is reduced by one, so that the
controllability of the polishing quality is improved.