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25 results about "Carbon Chloride" patented technology

Carbon Chloride is an excellent water soluble crystalline Carbon source for uses compatible with chlorides. Chloride compounds can conduct electricity when fused or dissolved in water. Chloride materials can be decomposed by electrolysis to chlorine gas and the metal.

Carbon tetrachloride removal system and process

The invention relates to the technical field of chemical recovery, and particularly discloses a carbon tetrachloride removal system and process, the system comprises a washing tower and a carbon tetrachloride removal assembly, the washing tower is used for introducing a solvent and a phosgene material; the tower top of the washing tower is used for outputting treated substances; a tower kettle of the washing tower is communicated with the carbon tetrachloride removal assembly, and the carbon tetrachloride removal assembly is used for removing carbon tetrachloride in materials from the washing tower. The solvent is introduced into the washing tower to wash the phosgene material, and after the solvent is introduced, the washing tower is not pure phosgene equipment, so that the safety performance is improved; and compared with the prior art that carbon tetrachloride is removed by utilizing a phosgene rectifying tower and a solvent refining tower, the combination of the washing tower and the carbon tetrachloride removal assembly is beneficial to reducing the energy consumption.
Owner:QINGDAO UNIV OF SCI & TECH +1

Metal powder injection molding process based on thermal degreasing adhesive

The invention discloses a metal powder injection molding process based on a thermal degreasing adhesive, and belongs to the technical field of metal powder metallurgy molding, and the metal powder injection molding process comprises the following steps: weighing raw materials, preheating and activating to obtain a premixture, melting and mixing to obtain an adhesive, extruding and granulating, obtaining feeding particles, carrying out injection molding to obtain a product green body, sintering and thermally degreasing, and cooling. A pure thermal degreasing process is adopted, dangerous chemical reagents such as nitric acid and oxalic acid do not need to be used, solvents such as n-pentane and carbon tetrachloride do not need to be depended on, in actual production, potential safety hazards in the production link can be greatly reduced, damage to the ecological environment is reduced, meanwhile, the body health of operators is guaranteed, and the production cost is reduced. The core requirements of modern industry on safe and environment-friendly production are met.
Owner:SHENZHEN ELEMENTPLUS MATERIAL TECH CO LTD

Preparation method and application of catalyst for preparing vinyl chloride by cracking 1,2-dichloroethane

The application discloses a preparation method and application of a catalyst for cracking 1,2-dichloroethane to produce vinyl chloride, and comprises the following steps: 1) a neodymium ore is leached with hydrochloric acid, and after filtering a leaching solution, potassium chloride is added to form a doped precursor K2[NdCl3]; 2) an active metal oxide is dissolved in hydrochloric acid, and then added into the doped precursor K2[NdCl3] solution, and co-precipitation is carried out by adding alkali to obtain an emulsion of a doped active component; the active metal oxide is at least one of oxides of vanadium, manganese, titanium and scandium; 3) the emulsion of the doped active component is mixed with a liquid carrier to obtain the catalyst; the liquid carrier is one or more of chloroform, carbon tetrachloride, 1,1,2-trichloroethane and chlorobenzene.
Owner:WANHUA CHEM GRP CO LTD

Apparatus for producing hydrogen chloride from carbon tetrachloride

ActiveCN116422252BProductsReagentsCarbon ChlorideEnvironmental engineering
This invention discloses an apparatus for producing hydrogen chloride from carbon tetrachloride, belonging to the field of hydrogen chloride process technology. It aims to solve the problem in existing technologies where the reaction of carbon tetrachloride with water produces toxic phosgene if too little water is used, and hydrogen chloride and carbon dioxide gases are produced if too much water is used. Since the boiling points of these two gases are very close at atmospheric pressure, separation is difficult. The apparatus includes a carbon tetrachloride storage tank and a pure water tank, each equipped with a heater. A first valve is installed on the carbon tetrachloride storage tank, and a second valve is installed on the pure water tank. The carbon tetrachloride storage tank is connected to a first heat exchanger, which is connected to a first gas pump. The pure water tank is connected to a second heat exchanger, which is connected to a second gas pump. The second and first gas pumps are connected to a mixing mechanism, which is connected to a tubular hydrolysis reactor. A concentrated sulfuric acid contact tower is connected to the tubular hydrolysis reactor.
Owner:JIANGSU LEE & MAN CHEM

Continuous production method of carbon tetrachloride

PendingCN120842042AHalogenated hydrocarbon preparationDistillationCarbon Chloride
The invention relates to a continuous production method of carbon tetrachloride, which comprises the following steps: mixing and vaporizing perchlorinated hydrocarbon and chlorine, and carrying out chlorination reaction at the temperature of 200-500 DEG C under the pressure of 0.6-1 MPa to obtain a crude product; performing gas-liquid separation on the crude product, returning the gas to the mixed vaporization step for recycling, and rectifying the liquid to obtain a carbon tetrachloride product; and returning other products obtained by rectification to the mixed vaporization step for recycling. In the production process, the raw materials are perchloro and chlorine, no hydrogen element participates in the production process, the required temperature and pressure conditions are relatively low, the reaction conforms to the concept of green chemistry, and the utilization rate of chlorine atoms in the whole process is 95% or above.
Owner:NEWERA CHEM SHANDONG CO LTD +1

Stearic acid melting kettle with monitoring function

ActiveCN116272677BChemical industryFusionCarbon ChlorideWater flow
The present application relates to stearic acid processing technical field, especially to a kind of stearic acid melting kettle with monitoring function, including kettle body, heating cavity is set in the inside of kettle body, heat-insulating cover is installed in the upper end of kettle body, heat-conducting block is embedded in the inner wall of kettle body, the heat transfer mechanism for heating is equipped in the bottom of kettle body, the outer wall of kettle body is equipped with the energy supply mechanism for heating and improving heating efficiency, the inside of kettle body is equipped with the mixing mechanism for improving melting speed and impurity removal mechanism.The advantages are that heating carbon tetrachloride will be vaporized, and carbon tetrachloride rising in bubble state will diffuse into upper water flow, so that the temperature of water flow is improved, and the bubble diffuses, the overall heat conduction is more uniform and fast, so that the melting of stearic acid is more unified and efficient, and the water temperature is lower, after heat transfer, the rising carbon tetrachloride is condensed, so as to sink after recovering liquid, so as to facilitate subsequent circulation diffusion heat exchange.
Owner:JIANGSU JINQIAO OIL TECH CO LTD

Online monitoring method for conversion of hydrochloric acid from carbon tetrachloride

The invention belongs to the technical field of conversion process monitoring, and provides an on-line monitoring method for conversion of hydrochloric acid from carbon tetrachloride, which comprises the following steps: acquiring historical data of a conversion process in a steady state and operation under various preset abnormal working conditions, and constructing time sequence data including trichloromethane concentration and process parameters and a corresponding state label historical data set; performing statistical feature extraction on the historical data set, and establishing a correlation model between the statistical features of the trichloromethane concentration and the process parameter state based on a machine learning algorithm; the method comprises the following steps: detecting the concentration of trichloromethane in a reactor outlet product in real time through an online analysis instrument, calculating the real-time statistical characteristic of the real-time trichloromethane concentration as the input of a correlation model, and comparing the output process parameter monitoring combination with the currently activated process parameters to generate a control instruction. By monitoring a key reaction intermediate (trichloromethane), the number of monitored process parameters is optimized, and the preposition of abnormal early warning can also be realized.
Owner:HUNAN HENGYANG JINYI TECHNOLOGY CO LTD

Method and system for comprehensive treatment of urban sewage containing mud

A kind of urban sludge-containing sewage comprehensive treatment method and treatment system, solve the problems of low-cost high-efficiency sludge dewatering and sewage treatment, the treatment method is: sludge-containing sewage is stirred, mixed, precipitated with carbon tetrachloride liquid in displacement reaction tank, and forms water layer and carbon tetrachloride liquid and sludge mixed layer, overflowed water, carbon tetrachloride and sludge vaporization separation to remove organic water and dry sludge, carbon tetrachloride recycling is used.The treatment system scheme is: the system includes: displacement dewatering and organic matter processing part consisting of displacement reaction tank, water treatment part consisting of water intermediate tank and adsorption tower and displacement agent condensing tower consisting of displacement agent recovery part and heating station part.The beneficial effects of the present application are: simple process, safe and reliable, the treatment efficiency is increased by more than 10 times, the cost is reduced by 85%, the moisture content of sludge displacement dewatering is less than 5%, sludge displacement dewatering and sewage organic matter inactivation treatment are completed at the same time.
Owner:LIAONING GUOZHONG HEAVY CARBON RESOURCES IND ENG TECH RES INST CO LTD

Method and system for detecting carbon tetrachloride value of activated carbon

The invention is applicable to the technical field of gas detection, and provides a method and a system for detecting the carbon tetrachloride value of activated carbon, the system comprises a pretreatment module, a temperature and flow control module, a carbon tetrachloride bubbling module, two infrared detection modules and an activated carbon adsorption module, and the acquisition module is used for acquiring the concentration data of the carbon tetrachloride gas in the mixed gas before and after entering the activated carbon adsorption module, obtaining the adsorption efficiency of the activated carbon and obtaining the carbon tetrachloride value of the activated carbon based on the adsorption efficiency. The method has the advantage that the characteristic absorption peak of the carbon tetrachloride in the infrared spectrum can be accurately captured. By acquiring the concentration change of the carbon tetrachloride gas before and after the carbon tetrachloride gas is adsorbed by the activated carbon sample, the instrument can efficiently and accurately characterize the CTC value of the activated carbon. Compared with a traditional national standard weighing method, the method provided by the system has the advantages that the detection efficiency is remarkably improved, the operation process is simplified, and the measurement precision is improved.
Owner:安徽蓝盾光电子股份有限公司 +1

Device and method for accurately controlling feeding of trace gas-phase carbon tetrachloride

The invention discloses a device for accurately controlling feeding of trace gas-phase carbon tetrachloride. The device comprises a constant-flux pump, a micro-channel evaporator, a constant-temperature unit and a CCl4 storage tank, the CCl4 storage tank is connected with the constant-flux pump through a pipeline, the constant-flux pump is connected with the micro-channel evaporator through a pipeline, and the constant-temperature unit is connected with the micro-channel evaporator through a pipeline to form a loop. Comprising the following steps: S1, setting the temperature of a constant temperature unit to be 90-120 DEG C, and starting the constant temperature unit; s2, the first valve and the third valve are in a closed state, and the second valve is in an open state; s3, setting the temperature of the first heating belt, the second heating belt, the third heating belt and the fourth heating belt to be 90-120 DEG C, and turning on a power supply of the heating belts; s4, the liquid level height of the CCl4 storage tank is checked and recorded; s5, when the actual temperature of the constant-temperature unit and the heating belt reaches the set temperature value, the flow of the constant-flux pump is set to be 0-20 mL / h, and the constant-flux pump and a third valve are opened; and S6, the constant-flux pump, the first heating belt and the second heating belt are sequentially closed, and the second valve is closed.
Owner:THE 404 COMPANY LIMITED CHINA NAT NUCLEAR

A method and system for determining volatile halocarbons in dissolved gas in seawater

PendingCN122385799AHalohydrocarbonCarbon Chloride
This invention discloses a method and system for determining volatile halogenated hydrocarbons in dissolved gases of seawater, belonging to the field of analytical chemistry. The method employs direct gas injection combined with a six-way valve switching injection system, enabling the direct and simultaneous determination of seven volatile halogenated hydrocarbons in seawater: chloroform, carbon tetrachloride, trichloroethylene, bromodichloromethane, tetrachloroethylene, dibromochloromethane, and tribromomethane. This eliminates the need for organic solvents and complex pretreatment, filling a technological gap in this field. Validation shows a detection limit of 0.1–1.1 nmol / mol, a retention time RSD ≤ 0.20%, a concentration RSD ≤ 4.93%, and a relative error between -2.01% and 1.56%. The method exhibits advantages such as high sensitivity, good stability, simple operation, and environmental friendliness, and can be directly applied to fields such as marine environmental monitoring and seabed oil and gas resource exploration.
Owner:江苏省地质局第六地质大队 +1

A kind of lattice copper and carbon vacancy co-modified zero-valent iron and its preparation method and application in catalytic dechlorination of carbon tetrachloride in water body

The application discloses lattice copper and carbon vacancy co-modified zero-valent iron and a preparation method and application thereof in catalyzing dechlorination of carbon tetrachloride in water, and belongs to the technical field of functional catalysts and underground water pollution remediation. The application solves the technical problem of slow and incomplete dechlorination caused by inherent electron competition between carbon tetrachloride and water. Based on an in-situ sacrifice strategy of the iron oxide layer, the application utilizes consumption of the surface iron oxide layer, oxygen volatilization and carbon reduction in a high-temperature ball milling process to induce formation of carbon vacancies, promote lattice doping of copper in the core of the zero-valent iron, promote outward release of iron and inward migration of copper (lattice doping), and prepare the lattice copper and carbon vacancy co-modified zero-valent iron catalyst with a symbiotic structure. The catalyst can realize rapid and complete dechlorination of carbon tetrachloride, the product is a chlorine-free product (methane, carbon monoxide and formic acid), the product recovery rate is greater than 80%, and the dechlorination reaction can occur in a wide pH environment.
Owner:HARBIN INST OF TECH

High-temperature-resistant PVC tile and preparation method thereof

InactiveCN121045703ARoof covering using tiles/slatesPolymer scienceCarbon Chloride
The invention provides a high-temperature-resistant PVC tile and a preparation method thereof, and belongs to the field of PVC materials, the high-temperature-resistant PVC tile is prepared from the following raw material components: 100 parts of PVC resin, 35-45 parts of calcium carbonate, 14-16 parts of a reinforcing agent, 2-3 parts of a plasticizer, 1-3 parts of a cross-linking agent, 0.5-1.5 parts of carbon black, 0.5-2 parts of zinc oxide and 0.4-0.6 part of an antioxidant, and then loading an acylating chlorination carbon nanotube on the surface. Through a unique formula and a preparation process, the heat stability of the PVC tile can be remarkably improved, the influence of high temperature on the performance of the material is effectively resisted, meanwhile, the binding force between the filler and a matrix is enhanced, the uniform dispersion capacity between the materials is improved, and it is guaranteed that the material has high mechanical strength under the condition of high filler content.
Owner:LAIZHOU GLASS FIBER REINFORCED PLASTICS PRODS +2

Iron powder water purifying agent and preparation method thereof

The invention discloses an iron powder water purifying agent and a preparation method thereof, and the iron powder water purifying agent comprises the following components in parts by weight: 2.7 to 3.5 parts of dodecyl acrylate, 9.8 to 11.0 parts of dibenzoyl peroxide, and 0.23 to 0.35 part of hydrophobic association cationic PDMC flocculant. According to the iron powder water purifying agent and the preparation method thereof disclosed by the invention, the water purifying agent prepared by the method can repeatedly remove impurities entrained in sewage, can realize rapid sedimentation of the impurities and oil stains in the water, and can be separated from the impurities to form a relatively large flocculating constituent, so that rapid sedimentation can be realized; compared with the prior art, the device has the advantages that the treatment efficiency of pollutants difficult to degrade can be effectively improved, separated impurities can be conveniently recycled, the impurities cannot be damaged, the saturated oil absorption rate of carbon pentachloride is high, and the device can be used under severe conditions.
Owner:GUANGDONG JIAYUAN ECOLOGICAL ENVIRONMENT CO LTD

A process for the preparation of 1,1,3,3,3-pentafluoropropene

This invention belongs to the field of organic synthesis technology, specifically relating to a method for preparing 1,1,3,3,3-pentafluoropropylene. This invention designs a perovskite-type catalyst doped with noble metals or synergistically constructs a supported metal catalyst. Through a collaborative mechanism where the support provides strong Lewis acidity and fluorination activity, while the noble metal provides dehydrogenation activity, the interfacial interactions and reaction matching of the catalytic system are precisely controlled. This allows for highly efficient catalysis of the integrated "telomerization-fluorination-dehydrogenation" reaction of vinyl chloride (CHCl=CH2), carbon tetrachloride (CCl4), and hydrogen fluoride (HF). The reaction can be carried out continuously in the same reactor and with the same synergistic catalyst system, without the need to change equipment or catalysts, resulting in outstanding production efficiency. Furthermore, the selectivity and controllability of the reaction conditions are significantly optimized, enabling high-selectivity and high-yield synthesis of the target product under mild conditions. Simultaneously, it achieves the resource utilization of industrial waste carbon tetrachloride, representing a major technological breakthrough in terms of raw material cost, process simplification, and environmental friendliness.
Owner:CIVIL AVIATION UNIV OF CHINA

Activity testing device for carbon tetrachloride activated carbon

The utility model relates to the field of activated carbon activity testing, in particular to an activity testing device for carbon tetrachloride activated carbon, which comprises an air compressor, a waste gas tank, a first support, a second support and a carbon tetrachloride saturator. The carbon tetrachloride saturator comprises a water bath box and a mixing barrel, the mixing barrel is filled with carbon tetrachloride liquid, the water bath box heats the mixing barrel in a water bath mode, so that the carbon tetrachloride liquid in the mixing barrel is converted into gas to be mixed with the treated air, and the mixed air is heated through the water bath box. The top of the activated carbon sample plate is suspended at the bottom of the spring scale through the connecting belt, the spring scale can monitor the mass of the activated carbon sample plate in real time and display the mass on the display screen, the activated carbon sample plate does not need to be taken out for weighing, and the operation is more convenient and faster.
Owner:JIANGSU LEE & MAN CHEM

A viscosity reducer, a preparation method and application thereof

The application provides a viscosity reducer and a preparation method and application thereof. The application provides a viscosity reducer, which comprises the following raw materials in weight components: 10-50 parts of non-polar component A, 10-60 parts of polar component B and 30-50 parts of surfactant C; the non-polar component A is selected from one or more of octane, petroleum ether, dotriacontane, octacosane, carbon disulfide, carbon tetrachloride, ethane, cyclohexane, liquid paraffin, ethyl acetate and diethylene glycol butyl ether; the polar component B is prepared by the reaction of styrene, maleic anhydride and acrylate; and the surfactant C is prepared by the reaction of the polar component B, an organic acid and a polyamine. The viscosity reducer provided by the application can significantly reduce the viscosity and shear force of the oil-based drilling fluid, improve the flowability of the oil-based drilling fluid, and especially reduce the viscosity and shear force of the oil-based drilling fluid after pollution.
Owner:CHINA PETROLEUM & CHEMICAL CORP +3

Preparation method of dichloromolybdenum dioxide

PendingCN121823655AMolybdenum halidesReaction temperatureCarbon Chloride
The invention discloses a preparation method of dichloromolybdenum dioxide. The preparation method comprises the following steps: mixing molybdenum trioxide, carbon tetrachloride and a solvent; and in an inert atmosphere, heating to 180-240 DEG C for reaction to obtain the dichloro molybdenum dioxide. According to the preparation method, the reaction temperature is low, the reaction conditions are easy to control, the reaction selectivity is high, the purity of the obtained target product molybdenum dioxide is high, and the purity gt of the molybdenum dioxide is high; 99% of molybdenum metal ions gt; the purity is 99.9999%.
Owner:SUZHOU JINHONG GAS CO LTD

A process for the preparation of diphenyl carbonate

The application belongs to the technical field of organic synthesis and relates to a method for preparing diphenyl carbonate. The method uses a deep eutectic solvent (DES) as a catalyst to catalyze the one-pot reaction of CO2, carbon tetrachloride and phenol in the presence of an organic solvent, and the reaction conditions are as follows: the initial pressure of CO2 is 1-6 MPa, the temperature is 100-160 DEG C, and the time is 6-12 h. After the reaction, the layers are separated by standing, the lower layer DES can be directly recycled, the upper layer product phase is subjected to rectification to remove the organic solvent to obtain diphenyl carbonate, and the organic solvent can be recycled. The application solves the problems of difficult recovery of the catalyst, many by-products and low yield in the traditional method, has the advantages of high product purity, recyclable catalyst and solvent and simple operation, and is suitable for industrial production.
Owner:QINGDAO UNIV OF SCI & TECH

Method and equipment for preparing metal rhenium coating by taking carbon tetrachloride as chlorine source

PendingCN121593020AChemical vapor deposition coatingReactive depositionCarbon Chloride
The invention relates to a method for preparing a metal rhenium coating by taking carbon tetrachloride as a chlorine source, which comprises the following steps: S1, under the conditions of 5-50kPa and 700-900 DEG C, introducing mixed gas of carbon tetrachloride and argon into raw material rhenium powder, and reacting to obtain rhenium pentachloride; and S2, the rhenium pentachloride obtained in the step S1 reacts under the conditions that the pressure is 5-50 kPa and the temperature is 1000-1300 DEG C, the rhenium pentachloride is deposited on a workpiece, the temperature is reduced to the room temperature, and the metal rhenium coating is obtained. The metal rhenium coating is good in compactness.
Owner:BEIJING NORTH HUACHUANG VACUUM TECH CO LTD

Process for the preparation of 5n cesium iodide

The application provides a preparation method of 5N cesium iodide and belongs to the technical field of inorganic material preparation. A cesium carbonate solution is purified to remove insoluble substances, and then cations such as calcium and magnesium are removed by using a cation exchange resin to obtain a purified cesium carbonate solution; the purified cesium carbonate solution is evaporated and concentrated, cooled and crystallized, and dried to obtain dry cesium carbonate; elemental iodine is added into water, carbon tetrachloride is added, and the carbon tetrachloride solution containing the elemental iodine is distilled to obtain refined elemental iodine; the dry cesium carbonate, the refined elemental iodine and hydrazine hydrate are mixed to obtain a cesium iodide solution, which is evaporated and concentrated, cooled and crystallized, and dried to obtain 5N cesium iodide. The application selects a low-cost and high-yield method to purify raw materials from the perspective of raw materials, and 5N cesium iodide is prepared, so that multiple recrystallizations are avoided, and the method has the characteristics of low cost and high yield.
Owner:XINYU GANFENG LITHIUM IND CO LTD

Anti-crack concrete material

InactiveCN120887677ACarbon nanotubeCarbon Chloride
The invention discloses an anti-crack concrete material, and relates to the technical field of concrete. When the anti-crack concrete material is prepared, a polyurethane prepolymer sequentially reacts with 4, 4 '-dihydroxyazobenzene and furfuryl alcohol to prepare a furan-terminated polyurethane prepolymer, and then the furan-terminated polyurethane prepolymer reacts with 1, 4-dimaleimide-2, 3-butanediol to prepare modified polyurethane; reacting the carboxylated carbon nanotube with thionyl chloride to prepare an acylating chlorinated carbon nanotube; sodium alginate, sunflower seed oil and a calcium chloride aqueous solution are subjected to a reaction, and self-repairing microcapsules are prepared; and mixing the coarse aggregate, the fine aggregate, the matrix asphalt, the modified polyurethane, the acyl chloride carbon nanotubes, the mineral powder and the self-repairing microcapsules to prepare the anti-crack concrete material. The anti-crack concrete material prepared by the invention has good low-temperature crack resistance, self-repairing performance, ultraviolet aging resistance and waterproof performance.
Owner:WUHAN XINTAI QINGJI MATERIALS CO LTD

A method for preparing porous nitrogen-containing carbon materials

ActiveCN116835562BCarbon preparation/purificationCarbonizationCarbon Chloride
This application discloses a method for preparing porous nitrogen-based carbon materials. The raw materials used are ethanolamine, carbon tetrachloride, tert-butanol, and terpineol. These four substances are mixed with mesoporous molecular sieves, heated in an oil bath, and dried to obtain a preliminary crude nitrogen-based carbon product. Then, carbonization is carried out in a tube furnace at 400-900℃ to completely carbonize the unreacted ethanolamine, carbon tetrachloride, tert-butanol, and terpineol in the crude nitrogen-based carbon product. After repeated washing with hydrofluoric acid and vacuum drying, the porous nitrogen-based carbon material is obtained. The selection of raw materials and the control of carbonization temperature result in a porous nitrogen-based carbon material with a large number of porous structures, a large specific surface area, increased vapor escape channels, and decreased light reflectivity, exhibiting good light absorption performance, an expanded absorption spectrum range, and enhanced absorption capacity. Therefore, using this porous nitrogen-based carbon material for desalination improves both the evaporation rate and the light conversion rate.
Owner:NINGXIA BAISTEKEYUAN CHEM CO LTD

Method for etching a magnetic tunnel junction layer stack

ActiveDE112018002498B4Carbon ChlorideReactive-ion etching
A method for etching a magnetic tunnel transition layer stack, hereinafter referred to as an MTJ layer stack, comprising: (a) providing an MTJ layer stack on a first electrode (10), wherein the MTJ layer stack comprises a top hard mask layer (15) and a first layer stack with a reference layer, a free layer, and a tunnel barrier layer between the reference layer and the free layer; (b) forming a structure in the hard mask layer by an etching step (31) which is an inert gas ion beam etching or a reactive ion etching with a fluorocarbon or carbon chloride, wherein the structure has a sidewall extending from a hard mask top to a top of the first layer stack;and (c) forming a structure in the first layer stack with a sidewall (20) forming a continuous surface with the sidewall in the hard mask layer and extending to an upper surface of the first electrode (10), wherein the structure in the first layer stack is generated by a process sequence comprising: (1) a first etching step (32i) which is an IBE with an inert gas; and (2) a second etching step (32r) which is a single reactive ion etching step with one or more chemicals selected from ethanol, ammonia and carbon monoxide, wherein the second etching step (32r) oxidizes non-volatile residues (19) on the sidewall of the first layer stack generated by the first etching step (32i) to obtain volatile residues (19x).
Owner:TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD

Process and plant for the production of methane chlorides with selective product regulation

ActiveCN120664939BCarbon ChlorideProcess engineering
The application discloses a product selective adjustable methane chloride production process and device. The product selective adjustable methane chloride production process adjusts target product composition by changing the form of chlorine gas feed into gas, liquid or gas-liquid mixed state. The product selective adjustable methane chloride production device comprises a chlorine gas inlet which can switch each other in the form of gas, liquid or gas-liquid mixed state. The application can flexibly regulate and control the selectivity of product dichloromethane, chloroform and carbon tetrachloride according to different feed states, and flexibly adapt to market changes.
Owner:JUHUA GRP +2