The invention discloses a device for accurately controlling feeding of
trace gas-phase
carbon tetrachloride. The device comprises a constant-flux pump, a micro-channel
evaporator, a constant-
temperature unit and a CCl4
storage tank, the CCl4
storage tank is connected with the constant-flux pump through a pipeline, the constant-flux pump is connected with the micro-channel
evaporator through a pipeline, and the constant-
temperature unit is connected with the micro-channel
evaporator through a pipeline to form a loop. Comprising the following steps: S1, setting the temperature of a constant
temperature unit to be 90-120 DEG C, and starting the constant temperature unit; s2, the first valve and the third valve are in a
closed state, and the second valve is in an open state; s3, setting the temperature of the first heating belt, the second heating belt, the third heating belt and the fourth heating belt to be 90-120 DEG C, and turning on a power supply of the heating belts; s4, the liquid level height of the CCl4
storage tank is checked and recorded; s5, when the actual temperature of the constant-temperature unit and the heating belt reaches the set temperature value, the flow of the constant-flux pump is set to be 0-20 mL / h, and the constant-flux pump and a third valve are opened; and S6, the constant-flux pump, the first heating belt and the second heating belt are sequentially closed, and the second valve is closed.