This invention relates to an enhancement-mode GaN HEMT device based on RESURF
electric field modulation, belonging to the field of
semiconductor power device technology. The invention aims to solve the technical problem of limited
breakdown voltage caused by concentrated
electric field at the gate edge in traditional enhancement-mode GaN HEMTs. The main technical solution involves introducing a p-type doped region within the AlGaN
barrier layer of the device, located between the gate and drain. This structure utilizes the RESURF effect to effectively modulate and homogenize the
electric field distribution in the gate-drain drift region when the device is off, thereby significantly improving the
breakdown voltage of the device and optimizing the
power factor while maintaining good switching characteristics.