According to the composite
corrosion inhibitor
etching liquid and the preparation method and application thereof, a composite
corrosion inhibition
system composed of the first
corrosion inhibitor and the second
corrosion inhibitor is introduced into an
acid etching system, and selective removal of a
copper seed layer under different
etching conditions is achieved; according to the composite corrosion inhibition
system, the corrosion defect of the surface of a
copper electrode can be remarkably reduced, the surface appearance can be improved, the lateral corrosion depth can be reduced, and meanwhile complete
etching of a residual
copper seed layer in a non-
electrode area is not affected. The two types of
nitrogen-containing heterocyclic corrosion inhibitors generate a synergistic
adsorption effect on the copper surface by utilizing the molecular structure and adsorption behavior difference to form a compact and stable composite
protection layer, so that the synergistic regulation and control on the overall corrosion rate and the local lateral
corrosion behavior are realized. The composite
corrosion inhibitor etching liquid has the advantages of being good in etching uniformity, remarkable in lateral
erosion inhibition effect, wide in
process window and suitable for industrial application.