The invention discloses an
indium oxide doped
cadmium oxide target material as well as a preparation method and application thereof. The preparation method of the doped
cadmium oxide target material comprises the following steps: (1) carrying out ball milling on
cadmium oxide
powder and
indium oxide
powder according to the
mass ratio of CdO to In2O3 being (95-99.5):(0.5-5) for uniform mixing; (2) putting the mixture obtained in the step (1) into a mold, and then putting the mold into a vacuum
hot pressing furnace; (3) vacuumizing the vacuum
hot pressing furnace, when the vacuum degree is smaller than or equal to 10 Pa, starting heating, conducting heat preservation for 1-3 h at the temperature of 700-800 DEG C, starting pressurization after heat preservation is conducted for 10-50 min through pressurization pressure of 10-40 MPa, keeping the pressure maintaining time for 20-40 min, and when the temperature is reduced to 400-600 DEG C, reducing the pressure to 3-15 MPa; and (4) when the temperature is reduced to
room temperature, opening a furnace door, and conducting demolding to obtain the doped
cadmium oxide target material. The grain size of the target material is smaller than 10 micrometers, the bending strength is larger than 80 MPa, the
sputtering effect is good, when the target material is used for preparing the CdO-based conductive film through
sputtering, the film can contain In, the light-transmitting
wave band of the film is widened, other impurities cannot be introduced, and the requirement for the
sputtering condition is low.