The invention relates to the technical field of
electronic materials, and provides a high-purity
metal complex precursor synthesis device which is characterized in that a reaction kettle is arranged for reaction, and the reaction kettle is communicated with an n-
hexane /
tetrahydrofuran storage tank, an n-
butyllithium storage tank and a DMSO
storage tank; a
hydrochloric acid aqueous solution dropwise adding tank, a
cyclopentadiene / substituted
cyclopentadiene dropwise adding tank, a bromopropane / liquefied
dimethylamine dropwise adding tank and a
solid feeder are used for adding raw materials, a reaction kettle is communicated with a
barrel-cone type three-in-one filter for filtering, the
barrel-cone type three-in-one filter is communicated with a
distillation kettle / liquid separation kettle for distilling or liquid separation, the
distillation kettle / liquid separation kettle is communicated with a rectifying
tower for rectifying, and the rectifying
tower is communicated with a rectifying
tower for rectifying. The
distillation kettle / liquid separation kettle is communicated with the reaction kettle for material returning; the distillation kettle / liquid separation kettle is communicated with a distillation condenser for distilling, condensing and recycling raw materials; according to the preparation method disclosed by the invention, the n-propyl
cyclopentadiene can be firstly prepared, and then the n-propyl cyclopentadienyl
zirconium trichloride is prepared; and finally, preparing to obtain the n-propyl cyclopentadienyl tri (dimethylamino)
zirconium.