344 results about "Silicon oxidation" patented technology

The application provides a negative electrode material and a preparation method thereof and a secondary battery, and relates to the technical field of battery materials. The negative electrode material comprises a silicon-based inner core and a carbon layer coated on the surface of the silicon-based inner core, wherein the silicon-based inner core comprises nanosilicon and a silicate containing a metal element M; the negative electrode material is subjected to section analysis and energy spectrum analysis, and meets the conditions of k1<=10, k2<=5 and 0.1 The preparation method of the negative electrode material comprises the following steps: heating and evaporating pre-disproportionated silicon monoxide material and M metal source material to obtain silicon monoxide gas and metal source gas; mixing and condensing the two kinds of gas to obtain an inner core material; and performing carbon coating treatment to obtain the negative electrode material. In the negative electrode material prepared by the application, the metal silicate effectively separates the nanosilicon domain and the silicon oxide domain, and is uniformly distributed, and the negative electrode material has high initial efficiency and excellent cycle performance.

The invention discloses warm-keeping polyimide aerogel and a preparation method thereof, and belongs to the technical field of high polymer materials. The preparation method comprises the following steps: 1, synthesizing a polyamide acid solution; 2, adding amino-containing organic silicon into the polyamide acid solution, mixing, and defoaming to form a spinning solution; step 3, preparing a nanofiber membrane by electrostatic spinning of the spinning solution; 4, crushing the nanofiber membrane, dispersing the crushed nanofiber membrane in a solvent, standing for 24-48 hours, and freeze-drying to obtain aerogel; and step 5, carrying out stepped heating thermal imidization treatment to obtain the polyimide aerogel. Amino-containing organic silicon is used as a cross-linking agent of polyamide acid, chemical connection is added for a three-dimensional network structure of the gel, and the structural stability of the aerogel is improved. In the thermal imidization process, organic silicon generates a silicon oxide and Si-O-Si network through staged pyrolysis, the silicon oxide exists in fiber gaps and forms an organic-inorganic hybrid interface with PI fibers, and the structural stability is further improved.

The invention provides a silicon-based material and a preparation method thereof, a lithium ion battery monomer, a battery device and a power utilization device, the silicon-based material comprises a porous carbon matrix and silicon nanoparticles located in pores of the porous carbon matrix, the surface of each silicon nanoparticle is provided with a silicon oxide passivation layer formed through a passivation reaction, the ratio of the ID / IG of the silicon-based material to the ID / IG of the porous carbon matrix before the passivation reaction is (0.95-1.05): 1; the mass multiple of the Si element and the C element in the silicon-based material is recorded as A, the mass multiple of the Si element and the C element before the passivation reaction is recorded as B, and the ratio of A to B is (0.95-1.05): 1. According to the invention, the thermal safety performance, the cycle performance and the rate capability of the lithium ion battery monomer can be improved.

A coated article including a first antireflective (AR) coating supported by a glass substrate, wherein the first coating may include, moving away from the glass substrate: a dielectric first high index layer; a dielectric first low index layer; a dielectric second high index layer; a dielectric second low index layer comprising an oxide of silicon; a dielectric third high index layer comprising an oxide of niobium; a dielectric first medium index layer, wherein the third high index layer comprising the oxide of niobium is located between and directly contacting the second low index layer comprising the oxide of silicon and the first medium index layer; a dielectric third low index layer; and an overcoat layer; wherein the first coating contains no IR reflecting layer based on silver and / or gold; wherein, from the perspective of a viewer of the coated article, the first coating may be configured so that the coated article has a film side reflective ΔE* value of no greater than 3.0 upon heat treatment of at least about 580 degrees C. The ΔE* value(s) may be measured either with a substantially symmetrical / similar AR coating on the other side of the same glass substrate, or absent any AR coating on the other side of the glass substrate.

The invention provides an MEMS component and a vibration cavity structure and a liquid ejection head thereof, the MEMS component comprises a piezoelectric actuator structure, and the vibration cavity structure is in contact with the piezoelectric actuator structure; the vibration cavity structure comprises a vibration cavity and a cavity wall, and the inner side wall of the cavity wall is arc-shaped; the vibration cavity structure is made of silicon and / or silicon oxide. The cavity wall of the vibration cavity structure disclosed by the invention adopts the design of the arc-shaped inner side wall, so that the deformation volume of the vibration cavity is increased on the premise that the density of the spray holes of the liquid spray head is not changed, and the size of liquid drops is effectively increased; and meanwhile, the liquid ejection head can realize ejection of liquid drops with the same size by using relatively small driving voltage, so that the energy consumption is reduced.

The invention discloses a method for recovering high-purity fluorine and silicon from fluorine-silicon slag and co-producing a low-alkali fluorine-free accelerator, which comprises the following steps: S1, dissolving the fluorine-silicon slag in a sodium hydroxide solution to obtain a solution A; s2, adding dilute sulphuric acid into the solution A, reacting until gel is obtained, and filtering to obtain filtrate A and high-purity silicon dioxide gel; s3, adding calcium sulfate and EDTA (Ethylene Diamine Tetraacetic Acid) into the filtrate A, stirring and reacting, and filtering after the reaction is finished to obtain calcium fluoride and filtrate B; and S4, taking clear water, heating, carrying out heat preservation, then adding aluminum sulfate, lithium sulfate, diethanol amine and the filtrate B obtained in S3, continuously stirring until the aluminum sulfate is completely dissolved, then adding hydrated magnesium silicate, continuously carrying out heat preservation stirring, and obtaining the low-alkali fluorine-free accelerator after stirring is finished. The method is simple in process and easy to implement industrially, and fluoride and silicon oxide obtained through separation are high in purity and beneficial to follow-up extension application; more importantly, high-value recycling of the fluorosilicon slag is achieved, and the problems of stockpiling waste and environmental pollution of the fluorosilicon slag are solved.

The application relates to the technical field of lithium ion battery materials, and discloses a low-expansion silicon-carbon material and a preparation method thereof. The low-expansion silicon-carbon material has a porous core-shell structure, the inner core is graphene / metal-doped amorphous carbon-coated nano silicon, and the shell is boron-doped amorphous carbon. The preparation method comprises the following steps: firstly, a silicon oxide compound, a graphene oxide solution and an organic metal polymer are added into an organic carbon source solution, spray drying is carried out, and an oxidized graphene-coated metal-doped silicon oxide precursor material is obtained through reaction; secondly, a mixed gas of a boron source gas and argon is introduced into the oxidized graphene-coated metal-doped silicon oxide precursor material, and a boron-doped silicon-carbon composite material is obtained through reaction; and thirdly, the boron-doped silicon-carbon composite material is soaked in a hydrofluoric acid solution, and the low-expansion silicon-carbon material is obtained after drying. Through the technical scheme, the problems of high expansion and poor rate performance of the silicon-carbon material in the related art are solved.

The invention discloses a method for smelting yellow phosphorus and alloy by using high-magnesium low-grade phosphorite, which comprises the following steps of: proportioning the high-magnesium low-grade phosphorite, a calcium flux, a siliceous flux, iron ore and a carbonaceous reducing agent, and carrying out reduction smelting treatment, so that part of apatite is reduced to generate yellow phosphorus steam, and part of phosphorus steam and reduced iron are chemically combined to form the alloy; calcium oxide, magnesium oxide, silicon oxide and aluminum oxide form low-melting-point smelting slag, and activated slag is obtained through water quenching. The method can provide technical reference for efficient resource utilization of low-grade phosphorite, especially high-magnesium and high-iron type low-grade phosphorite, three products of high-quality yellow phosphorus, high-added-value ferrophosphorus and activated smelting slag are obtained at the same time, and no new solid waste is generated in the process.

The invention relates to the technical field of environmental waste treatment, and discloses a preparation method of modified household garbage incineration fly ash, the modified household garbage incineration fly ash comprises the following components by mass: 90-99 parts of a fly ash matrix; 0.1 to 2 parts of a plasma activation layer; 0.5 to 8 parts of a silicon oxide coating layer; the preparation method comprises the following steps: pretreating the fly ash; performing plasma activation; preparing a mineralizing solution; performing biomimetic mineralization; and calcining at low temperature. The plasma activation layer is introduced, the silicon oxide coating layer is constructed, and the phosphorus oxide or the boron oxide is cooperatively introduced, so that the microstructure and the surface chemical property of the material are effectively optimized, the specific surface area and the pore volume of the material are increased, and a microporous, mesoporous and macropore synergistic multistage pore channel structure is constructed; the adsorption capacity and the adsorption rate of various waste gas pollutants are improved.

An oxide film etching method includes: forming a protective film of a metal or a metal nitride that does not contain silicon so as to cover a protection target film, among the protection target film containing silicon and a silicon-containing oxide film exposed on a surface of a substrate; supplying, to the substrate, a mixed gas including a hydrogen fluoride gas and an ammonia gas to react with the silicon-containing oxide film, and modifying the oxide film to generate a reaction product; and sublimating and removing the reaction product.

The invention provides a paper-plastic cup package and a preparation method thereof. The package comprises a cup body and a cover film, wherein 150-300g / m < 2 > paper serves as a base material layer of the cup body, and a coated polylactic acid barrier layer and a composite heat sealing layer are sequentially arranged on the inner side of the base material layer. Wherein the barrier property of the barrier layer is enhanced through aluminizing / silicon oxide / aluminum oxide, the heat sealing layer adopts a gradient structure of a blend of PBS at the center part and PBS / PCL at the edge part, and a PCL content linear increasing mixing region with the width of 3-5mm is arranged at the edge part to optimize thermal stress distribution. According to the preparation method, the base material layer, the barrier layer and the heat sealing layer are bonded step by step through a dry type composite technology, and interlayer combination is achieved by combining hot press molding and a multi-stage curing technology; the cup body forms a sealing structure matched with the concave ring of the cover body through rolling flanging, and the cover body is integrally connected with the cup body through heat sealing. The structure adopts a full-degradable material system, has excellent oxygen-blocking / water-blocking performance and heat-sealing reliability, and is particularly suitable for long-shelf-life packaging requirements of liquid food such as yoghourt and the like.

The invention provides a perovskite / silicon laminated solar cell and a preparation method thereof. The perovskite / silicon laminated solar cell comprises a silicon bottom cell, a hole transport layer, a perovskite light absorption layer, a two-dimensional perovskite interface modification layer, an electron transport layer, an electrode, a buffer layer and a silicon oxide protection layer which are laminated in sequence. By means of the unique structure of the perovskite / silicon laminated solar cell, the problem of stability degradation caused by atomic oxygen erosion and ultraviolet radiation in the space service process can be effectively reduced, and the service life of the perovskite / silicon laminated solar cell is prolonged.

Exemplary semiconductor processing methods may include providing a catalyst precursor to a processing region of a semiconductor processing chamber. A substrate may be disposed within the processing region. The substrate may include a silicon-and-oxygen-containing material and one or more silicon-containing materials. The methods may include contacting the substrate with the catalyst precursor. The contacting may adsorb the catalyst precursor on the silicon-and-oxygen-containing material and / or the one or more silicon-containing materials. The methods may include providing an etchant precursor to the processing region. The methods may include contacting the substrate with the etchant precursor. The contacting may selectively remove the silicon-and-oxygen-containing material.

The present invention relates to the field of refractory technology, and in particular to a refractory material of silicon nitride combined with silicon carbide and a preparation method thereof, comprising silicon nitride, silicon carbide, aluminum oxide, magnesium oxide, borax, graphite and a binder; wherein the components are, by mass percentage, silicon nitride: 6-51%; silicon carbide: 25-35%; aluminum oxide: 10-20%; magnesium oxide: 5-15%; borax: 3-8%; graphite: 2-6%; binder: 4-10%, the binder being ethyl silicate, polyvinyl alcohol or styrene-butadiene copolymer, the silicon nitride being α-type silicon nitride, the silicon carbide being β-type silicon carbide, and the aluminum oxide being α-type aluminum oxide. The present invention, by combining silicon nitride and silicon carbide, provides excellent high-temperature stability and wear resistance, while possessing excellent chemical stability and low thermal expansion coefficient, and its innovative preparation method ensures the uniformity and high quality of the material, meeting the strict requirements for refractory materials in high-performance industrial applications.

The invention relates to the technical field of lithium ion battery manufacturing, and discloses a preparation method of a silicon-containing silicon oxide-phenolic resin-artificial graphite composite negative electrode material, which comprises the following steps: grafting phytic acid on the surface of silicon-containing silicon oxide to construct a protonated acidic site, mixing modified silicon-containing silicon oxide, phenolic resin and artificial graphite, and keeping at a constant temperature to obtain the silicon-containing silicon oxide-phenolic resin-artificial graphite composite negative electrode material. Preferentially carrying out pre-polycondensation by utilizing phytic acid catalysis interface resin to form a gel layer, and rapidly removing a solvent to obtain a precursor; according to the preparation method disclosed by the invention, interface chemical anchoring is established before solvent volatilization by utilizing a dynamic competitive mechanism, so that the problem of stripping of resin and active particles caused by solvent volatilization in a traditional process is solved, and the structural stability and the electric conduction continuity of the material in a battery circulation process are improved.

An electrode for a lithium metal battery according to an embodiment of the present invention comprises a lithium metal storage layer containing silicon oxide particles. The silicon oxide particles have a porous structure, and the molar ratio of oxygen to silicon contained in the silicon oxide particles is 1.5 or more and less than 2.0. A lithium metal battery according to an embodiment of the present invention includes an electrode for a lithium metal battery according to the above embodiment.

The all-solid-state battery according to the present disclosure comprises: a cell stack including a solid electrolyte layer, a positive electrode layer and a negative electrode layer, the solid electrolyte layer being disposed between the positive electrode layer and the negative electrode layer; and an outermost layer provided on one surface or both surfaces of the cell stack in a stacking direction of the positive electrode layer, the solid electrolyte layer, and the negative electrode layer. The outermost layer includes an epoxy resin and glass particles, and the glass particles include boron (B) oxide, silicon (Si) oxide, and aluminum (Al) oxide.

A method for exfoliating three-dimensional nanomaterials based on carbon nanotube growth is disclosed. A catalyst is loaded onto the surface of a three-dimensional nanomaterial composed of two-dimensional nanosheets. Energy, a carbon source, H2, and Ar are provided to the three-dimensional nanomaterial in a reactor to exfoliate the two-dimensional nanosheets by growing CNTs. The three-dimensional nanomaterial is composed of at least one combination of two-dimensional nanosheets, including nanoflowers and nanolayers. The two-dimensional nanosheets include at least one of alumina, silicon oxide, and magnesium oxide. The three-dimensional nanomaterial is obtained through hydrothermal or solvothermal chemical reactions. The energy is provided by indirect heating of the substrate, which is achieved by directly heating the reactor through thermal radiation or convection to generate heat in the substrate. This invention solves the problem of the difficulty in exfoliating three-dimensional nanomaterials.

The application discloses a method for precisely modulating microstructure of a silicon-rich silicon oxide film and a product prepared by the method. x The method comprises the following step S20: in-situ heating SiO x Film samples, and the electron beam generated by the transmission electron microscope is irradiated on the SiO x Film samples, so as to realize the thermal annealing treatment of the SiO x Film. The method promotes the process of decomposing the SiO x Film into nanometer silicon crystals and silicon dioxide by means of heating combined with electron beam irradiation, the processing area can be precisely controlled to the nanometer level, rapid thermal annealing is realized, and damage caused by the thermal annealing to the SiO

This invention discloses a method for controlling the thermal relaxation path of superconducting nanostructures and its application. This method utilizes a van der Waals integration strategy to sequentially fabricate a molybdenum disulfide layer on a silicon / silicon oxide substrate using chemical solution deposition and a niobium nitride superconducting layer using magnetron sputtering, constructing a niobium nitride / molybdenum disulfide heterostructure with intrinsic anisotropic thermal conductivity. Superconducting nanodevices with specific geometric configurations are designed for this heterostructure. Leveraging the ultra-high in-plane thermal conductivity of molybdenum disulfide and its suppressed out-of-plane heat transfer characteristics, the method achieves directional control of the internal thermal relaxation path of the superconducting nanostructure, verifying its dual advantages of optimizing thermal management and enhancing superconducting performance. The control method of this invention is mature and controllable, effectively transforming disordered thermal relaxation into directional heat transfer, significantly improving the thermal stability and integration density of superconducting devices, and providing a core solution for the thermal management of nanocircuits in fields such as superconducting quantum computing and high-sensitivity quantum detection.

The invention belongs to the technical field of secondary batteries, particularly relates to a silicon-oxygen-carbon composite negative electrode active material, and further discloses a preparation method of the silicon-oxygen-carbon composite negative electrode active material and application of the silicon-oxygen-carbon composite negative electrode active material to preparation of a battery negative electrode plate and a secondary battery. The silicon-oxygen-carbon composite negative electrode active material comprises a silicon oxide SiOx inner core and a carbon coating layer coating the surface of the silicon oxide SiOx inner core, conductive carbon is dispersed in the silicon oxide SiOx inner core, and a microporous structure is formed in the carbon coating layer. According to the silicon-oxygen-carbon composite negative electrode active material, the conductive carbon is dispersed and mixed in the silicon oxide SiOx particles, the conductive connection effect on the silicon particles is obvious, the defect that the internal conductivity of a silicon-based material is poor is effectively overcome, and the conductivity and expansion performance of the silicon-oxygen-carbon composite negative electrode active material are improved.

The present application belongs to the technical field of steel metallurgy continuous casting, and particularly relates to a crystallizer non-lithium protecting slag for stainless steel slab continuous casting and application. The non-lithium protecting slag is composed of the following components: calcium oxide 28-40%, silicon oxide 26-38%, aluminum oxide 2-8%, sodium oxide 9-14%, fluoride ion 5-11%, magnesium oxide 1-4%, boron oxide 1-5%, manganese oxide 0.5-3%, total carbon 2-4.5%, and the rest is inevitable impurities and carbonate volatiles; the mass ratio of sodium oxide / magnesium oxide is greater than or equal to 3.5. The hollow particle type protecting slag product designed in the present application can reduce the ton slag cost by 1000-2500 yuan, and has the performance of the conventional lithium-containing austenitic stainless steel slab continuous casting protecting slag, and is beneficial to the smooth running of the austenitic stainless steel high-pulling speed continuous casting process, and reduces the raw material procurement cost of the steel enterprise, so that the market competitiveness of the stainless steel product can be further enhanced.

The present application relates to a trench sidewall gate with lead-out structure and a manufacturing method thereof, the method comprising: etching a first and a second trench on a substrate; filling the first and the second trench with gate material; forming an etching stop layer on the substrate, which exposes the first trench and partially exposes the second trench; etching the gate material in the first trench; after removing the etching stop layer, chemical vapor deposition is performed to form silicon oxide covering the first and the second trench; removing the silicon oxide on the gate material in the first trench by P-etching; etching the gate material in the first trench with the silicon oxide left on the sidewall of the first trench as an etching stop layer, forming a trench sidewall gate on the bottom sidewall of the first trench, and the gate material in the second trench, which is in communication with the trench sidewall gate, as a gate lead-out structure. The top of the gate material in the second trench can stay on the surface of the substrate, and the gate material can be led out to form an electrical connection to the gate through a conventional via process.

The present invention provides a powder that has high reaction efficiency and can maintain that reaction efficiency even after repeated oxidation-reduction reactions. The powder comprises iron oxide particles and oxide particles, wherein the oxide particles contain at least one of Cr and Si as an oxide, the average particle diameter of the oxide particles is 0.5 nm or more and 100 nm or less, the average value of the ratio Fmax / Fmin (the ratio of the maximum Ferret diameter Fmax to the minimum Ferret diameter Fmin) of the oxide particles is 2.0 or more, and the oxide particles are in contact with the iron oxide particles at an average contact rate of 20% or more and 80% or less.

This invention provides an etching method and an etching apparatus capable of suppressing the distribution of etching amount between substrates. Multiple substrates housed in a vacuum chamber each have a first processing object and a second processing object. The first processing object is a silicon oxide layer (53), and the second processing object is a silicon nitride layer (51) or a silicon layer (52) covered by the silicon oxide layer (53). The etching method includes the following steps: a first step, introducing NH3 gas and HF gas into the vacuum chamber to etch the first processing object; and a second step, after the first step, supplying plasma generated from a gas containing NH3 gas and NF3 gas into the vacuum chamber to etch the second processing object.

The invention belongs to the technical field of aluminum smelting solid hazardous waste recycling, and particularly relates to a recycling method of aluminum oxide-rich complex electrolyte hazardous waste. According to the method, the complex aluminum electrolyte hazardous waste, aluminum salt and silicon-containing oxide are mixed and then subjected to segmented roasting-leaching treatment, fluorine in the electrolyte is converted into aluminum fluoride firstly and then converted into silicon tetrafluoride gas, separation of fluorine and aluminum and separation of gas and solid are achieved, and sodium and lithium elements are converted into soluble salt and further separated and recycled. According to the process, collaborative recovery and high-value utilization of various valuable elements in the complex aluminum electrolyte hazardous waste are achieved. The whole technological process is environment-friendly, toxic and harmful gas emission is avoided, secondary solid waste residues are not generated, the method has the advantages of being simple in process, high in recovery rate, high in product additional value and the like, and a feasible technical scheme is provided for resource utilization of the aluminum electrolysis solid waste.

The present application relates to a kind of cleaning agent for coating pretreatment and its preparation method, belong to cleaning agent technical field.The present application discloses the cleaning agent for coating pretreatment includes the following weight parts raw materials: rust inhibitor 3-6 parts, corrosion inhibitor 0.1-1 part, brightener 5-10 parts, new surfactant 5-20 parts, modified silane coupling agent 0.1-2 parts, defoaming agent 0.1-1 part, water 20-30 parts.Brightener can reduce the roughness of metal surface increase luster and enhance the cleaning effect, cooperate with corrosion inhibitor to keep the luster of metal surface.Silane coupling agent has the effect of reducing surface tension to improve decontamination capacity, by nano metal particles to modify silane coupling agent, form silicon oxide film with reducibility on metal surface during cleaning.The present application can prepare the cleaning agent with good cleaning effect and corrosion resistance.

The invention discloses a high-efficiency and low-cost process for smelting ultra-pure ferritic stainless steel, which comprises the following steps of: tapping after a decarburization oxidation period in an AOD (Argon Oxygen Decarburization) furnace smelting stage, carrying out steel slag mixing control on the tapping of the AOD furnace, only adding lime in an oxygen blowing decarburization stage in the AOD furnace to neutralize SiO2 generated by silicon oxidation, controlling the addition amount of the lime to be 1.0-1.5, and controlling the total slag amount to be less than or equal to 35kg / t steel; the steel ladle is sequentially subjected to primary vacuum oxygen blowing decarburization and secondary vacuum reduction desulfurization in the VOD furnace, and the stirring strength of bottom argon blowing of the primary vacuum oxygen blowing decarburization is limited by pushing away the top slag surface of the steel ladle to achieve effective contact of oxygen and molten steel; in secondary vacuum reduction desulfurization, reducing agent consumption is calculated from the whole balance of chromium in molten steel and slag. According to the novel smelting process, reduction is not carried out in the AOD furnace, the slag amount is reduced, the steel ladle top slag skimming operation link behind the furnace is omitted, the production rhythm is accelerated by 30-40 min, and the cost per ton of steel is reduced by more than 120 yuan per ton of steel.

The present invention relates to a catalytic article for treating an exhaust gas stream, the catalytic article comprising:-a substrate having an inlet end and an outlet end defining an axial length; -a first coating extending part or the entire axial length of the substrate, the first coating comprising a first catalyst comprising a vanadium component; -a second coating extending part or the entire axial length of the substrate, the second coating comprising a second catalyst comprising a noble metal component; and-a third coating extending part or the entire axial length of the substrate, the third coating comprising or consisting of an inorganic oxide selected from the group consisting of titanium oxide, silicon oxide, zirconium oxide, tungsten oxide, rare earth oxides such as lanthanum oxide and cerium oxide, any combination thereof or a composite oxide thereof, wherein the third coating is positioned as an intermediate layer between the first coating and the second coating over part or the entire axial length of the substrate. The invention also relates to a method and system for treating an exhaust stream containing nitrogen oxides with the catalytic article.

The invention discloses a low-warping-degree thin film solar cell manufacturing method, and aims to solve the warping problem caused by mismatching of material intrinsic stress and thermal expansion coefficient in cell preparation. According to the technical scheme, when an epitaxial wafer is preprocessed, an Au contact layer, a compressive / tensile stress metal alternating film layer and an Au bonding layer are sequentially evaporated; when the thin film supporting substrate is pretreated, a Cr-Ti-Pt-Au bonding layer is evaporated on one side, a silicon nitride, silicon oxide or aluminum oxide warping adjustment layer is prepared on the other side, and photoetching trepanning and evaporation of a back contact electrode are required to be performed on the warping adjustment layer for an electrode structure on the different side; and after contraposition permanent bonding, a finished product is obtained through temporary bonding, substrate removal, photoetching coating, antireflection film evaporation and alloy treatment. Internal and external stress is offset through the double-layer warping adjusting structure, the same-side electrode structure and the different-side electrode structure are adapted, the process is mature and easy to popularize, the warping degree of the battery is effectively reduced, and the product yield and the use reliability are remarkably improved.