This invention relates to a method for preparing electronic-grade
hydrofluoric acid. The invention utilizes a microchannel reactor for the
fluorine oxidation reaction, significantly reducing
fluorine consumption and safety hazards during production. Furthermore, the microchannel reactor enhances the gas-liquid two-phase
mass transfer during the oxidation reaction, further improving
impurity removal and product quality. The addition of multi-effect
distillation to the
distillation process not only enables secondary heat utilization but also saves on the use of high-temperature heating media at the bottom of the column, effectively reducing
energy consumption. In the modified liquid, DMF serves as the
solvent,
cobalt nitrate provides
cobalt ions, and vinylguanidine provides
guanidine functional groups and amino groups.
Ammonia and
propanethiol are used as
plasma gases to introduce amino and
thiol groups onto the
membrane surface. These groups help improve membrane selectivity, effectively separating
metal and non-
metal ions, as well as acidic impurities in the raw materials.