The invention discloses a high-conversion-rate process and
system for continuously synthesizing bis (diethylamino)
silane by a
gas phase method, and belongs to the technical field of
fine chemical engineering and advanced material preparation. The process takes
dichlorosilane and
diethylamine as raw materials, and comprises the following steps: carrying out
system inerting pretreatment; accurately metering the raw materials according to a specific
molar ratio of (1: (4.0-5.0)), gasifying and mixing; the
mixed gas is subjected to a continuous gas-
phase reaction at 60-70 DEG C (preferably 65 DEG C), and
solid byproducts are suspended through
enhanced heat transfer and stirring; continuously discharging the reaction
slurry through liquid level control, and removing solids through two-stage online
filtration (containing nanoscale fine
filtration); and finally, continuously rectifying the filtrate under reduced pressure to obtain a high-purity product. According to the method,
solvent pollution is thoroughly eliminated, the bottlenecks of easy blockage and difficult continuity of a
gas phase method are overcome through precise
temperature control and an online
solid removal technology, and the conversion rate gt of
dichlorosilane is realized; the product purity is gt; 99.9% stable
continuous production is achieved, and the high-end
semiconductor process requirements are met.