The invention provides a high-temperature
boron diffusion process for prolonging the service life of a
quartz spare part, and relates to the technical field of TOPCon battery preparation. The process comprises the following steps: heating a
silicon wafer to carry out a pre-
oxidation process;
oxygen and a
boron source are introduced, the pressure is adjusted for first
boron diffusion deposition, and
nitrogen is used for purging after deposition; repeating the steps to carry out second
boron diffusion deposition and third
boron diffusion deposition; and then purging and propelling are carried out, the temperature is increased again, the pressure is adjusted,
oxygen is introduced for post-oxidation treatment, and finally cooling, pressure returning and boat discharging are carried out. According to the method, the
oxygen introduction amount is increased in the deposition step, so that the reaction amount of oxygen and the boron source is increased while the consumption of BCL3 is not increased; the reaction pressure is improved, and the pumping speed is reduced, so that the
deposition rate is improved, and PN junctions with higher concentration are obtained; in the post-oxidation stage, the temperature and the oxygen introduction amount are reduced, the oxidation time is prolonged, a shallow PN junction can be obtained, oxidation of
quartz is reduced, and the service life of
quartz spare parts is prolonged.