The utility model discloses a kind of
semiconductor polishing liquid anti-deposition devices, including the
storage tank for storing
semiconductor polishing liquid, the side surface of the
storage tank is equipped with circulation conveying component for
semiconductor polishing liquid circulation, rotating drive component is installed on the position of the
storage tank and corresponding the circulation conveying component, the bottom of the storage tank is also equipped with agitating component for semiconductor polishing liquid agitation, the circulation conveying component includes fixedly connected in the bottom of the side surface of the storage tank circulation pump, conveying
pipe is installed on the circulation pump, rotatable annular
pipe is connected to the other end of the conveying
pipe.The utility model is by circulation pump and is sent to annular pipe by conveying pipe in the storage tank polishing liquid and is evenly sprayed by spray head, positive and negative rotation motor drives driving link to make annular pipe reciprocating rotation expand spraying range, while agitating motor drives agitating blade to agitate the polishing liquid in the storage tank, ensure its uniform distribution.