4 results about "Tungsten borides" patented technology

Disclosed herein are compounds, methods, and tools which comprise tungsten borides and mixed transition metal borides.

A method of selectively etching a hardmask layer formed on a device substrate is disclosed. The method includes providing an etching gas mixture to a processing region of a processing chamber, wherein a device substrate is disposed in the processing region when the etching gas mixture is supplied to the processing region, wherein the device substrate can include a substrate, at least one cavity formed in the substrate, and a hardmask layer formed over the at least one cavity and over the substrate. The method also includes providing radio frequency (rf) power to the etching gas mixture to form a plasma in the processing region.

This invention discloses a multifunctional carbon nanotube-based radiation-shielding composite fiber for high-performance protective equipment and its preparation method, relating to the field of functional fiber materials technology. The composite fiber comprises the following components: organic polyester, functionalized multi-walled carbon nanotubes, nano-tungsten boride, an active agent, and a binder. The preparation method involves first subjecting the raw materials to cyclic homogenization treatment, followed by a two-stage melt-blowing process to form a composite fiber with a three-dimensional network structure. This composite fiber possesses excellent multifunctional properties, including protection against gamma rays and X-rays, protection against neutron radiation, antibacterial properties, and electrical conductivity. It is lightweight, flexible, and high-strength, making it suitable for the field of high-performance protective equipment.