The invention belongs to the field of
plasma immersion
ion implantation, and specifically is a
plasma immersion
ion implantation integrated
machine for alloys, comprising an
operating table, a power supply module and a
processing tank are fixedly installed on the top of the
operating table, the power supply module is located on one side of the
processing tank, the
alloy product and the inner wall of the
processing tank are energized through the power supply module, since the
plasma is at zero potential and the sample is at
negative potential, the positive ions in the plasma are injected into the target sample through the
potential difference, so that a modified layer is attached to the surface of the
alloy, and an
ultrasonic vibration module is added, ultrasonic
waves are introduced as an auxiliary in the
oxidation process, and the
ultrasonic cavitation effect generated by the ultrasonic
waves is utilized, so that the
electrolyte can fill the inside of the material through the pores, reduce the
concentration gradient at the interface between the
metal and the
electrolyte solution, make the
current distribution more uniform, prevent the
excessive growth of the local
oxide film, and thus improve the thickness uniformity and
bonding strength of the micro-arc oxidation
coating.