The utility model provides a
continuous operation system for recycling TMAH waste liquid in the
semiconductor industry, which relates to the technical field of
industrial wastewater treatment and comprises a primary purification subsystem and a deep purification subsystem which are connected in sequence, the primary purification subsystem comprises a first-stage filter, a second-stage filter and a third-stage filter which are connected in sequence; the deep purification subsystem comprises a
raw material tank A and a
raw material tank B, feed ports of the
raw material tank A and the raw material tank B are connected with a
discharge port of the preliminary purification subsystem,
discharge ports of the raw material tank A and the raw material tank B are connected with an
electrodialysis membrane stack, a TMAH purified liquid output port of the
electrodialysis membrane stack is connected with the concentration
adaptation subsystem, and a waste liquid output port of the
electrodialysis membrane stack is connected with
reflux ports of the raw material tank A and the raw material tank B and a TMAH waste
liquid tank respectively; suspended
photoresist is removed from the TMAH waste liquid through the primary purification subsystem, filtered liquid in the raw material tank A and the raw material tank B alternately enters an electrodialysis membrane stack for deep purification, and residual waste liquid is discharged. According to the utility model, zero
discharge of
hazardous waste in the TMAH waste liquid treatment process is realized, and
photoresist can be completely recycled.