A purification method of a
tungsten hexafluoride gas relates to a
fluoride of
tungsten. The purification method comprises the following steps: removing oil by equipment, pressurizing with
nitrogen, vacuumizing to the limit, turning on a
nitrogen heater, introducing the heated
nitrogen into a
system, and vacuumizing to the limit; filling a
hydrogen fluoride removal
tower with nitrogen, putting
tungsten hexachloride into the
hydrogen fluoride removal
tower, introducing high-purity
tungsten hexafluoride into a finished product gathering tank, reacting with steam adhered to the wall of the tank to generate
hydrogen fluoride, sucking-back impure
tungsten hexafluoride in the finished product gathering tank into a rectifying still for low-temperature curing after displacement, detecting content of foreign gas, and stopping high-purity
tungsten hexafluoride displacement after qualified; heating primary tungsten
hexafluoride and carrying out low-temperature curing, vacuumizing the rectifying still, adsorbing
tail gas by a basic
spray tower, thawing by hot water, and detecting when pressure is stable and rectifying; carrying out
reflux condensation on evaporated tungsten
hexafluoride gas in the rectifying
tower, removing impurities, rectifying primary tungsten hexafluoride gas and gathering, detecting, gathering by the finished product gathering tank, taking a liquid sample, and detecting
metal impurities in tungsten hexafluoride.