The invention relates to a monosilane preparation method, which comprises: carrying out a
contact reaction on
silicon tetrafluoride and a
solid alkali solution, carrying out
filtration separation on the reaction material, and carrying out first rectification treatment on the
liquid phase product to obtain a first
intermediate product; carrying out hydrotreatment on the first
intermediate product, and carrying out second rectification treatment on a
reaction product to obtain a second
intermediate product; and carrying out
disproportionation reaction on the second intermediate product, and carrying out third rectification treatment on the
reaction product to obtain monosilane. According to the preparation method provided by the invention,
silicon tetrafluoride is used as a
silicon source, so that the
raw material cost is reduced; although rectification treatment is involved, the
boiling point of a product is relatively higher, the purification difficulty is small, the
energy consumption is lower, rectification of
halogen-containing substances is not involved, a rectification device does not need to consider the
corrosion problem, and the device investment is reduced; a byproduct is only villiaumite of
alkali metal, and the application field is wide; moreover, in the preparation method, all the raw materials can be recycled, and the overall cost
advantage is more obvious.