The invention discloses an industrial
synthesis system and an industrial synthesis method of electronic-grade
diborane, and belongs to the technical field of electronic-grade
diborane production, the industrial
synthesis system comprises a reaction part, a treatment part and a filling
system, the reaction part comprises a reaction kettle and a collection
cold trap, and the treatment part comprises a light component removal
tower and a heavy component removal
tower; the industrial synthesis method comprises the following steps: adding a
potassium hydride raw material and
boron trifluoride into a reaction kettle for reaction, remaining in a collection
cold trap, conveying to a light component removal
tower, extracting light components such as
nitrogen and
oxygen from the top of the light component removal tower to a three-
waste treatment system, extracting light component removal components from the side line of the light component removal tower to enter a heavy component removal tower, and removing heavy components from the heavy component removal tower. Heavy components are extracted from the tower kettle of the heavy component removal tower to a three-waste
system, and high-purity
diborane gas is extracted from the tower top of the heavy component removal tower to a filling system. According to the method disclosed by the invention, the electronic-grade diborane of which the purity is greater than or equal to 99.999% can be finally produced, and the problem that the purity of the electronic-grade diborane is not enough in the prior art is solved.